BME 142: Microfabrication

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Department of Biomedical Engineering

Undergraduate technical elective course in Biomedical Engineering Program, Winter 2024

Offered during Winter Quarter, BME 142, Microfabrication, is a four-unit technical elective course for biomedical engineering majors.  The course introduces the fundamentals of microfabrication and prototyping with the essential steps of photolithography, soft-lithography, micromolding and alternative fabrication techniques. Various micro/nano devices were introduced including MEMS, BioMEMS, microfluidics, etc. Special emphasis was placed on micro/nano devices for biomedical applications, such as microfluidic devices for on-chip diagnosis or analysis of biological samples.  A final group project related to a micro device was integrated to help students gain a better understanding of various microfabrication methods used. In addition, a visit to the cleanroom facility is arranged to help enhance the understanding of different equipment used in microfabrication.

Course learning outcomes include the following:

  • Understand the fundamentals of microfabrication and prototyping.
  • Identify and describe the principle and process of photolithography, soft-lithography, bulk and surface micromachining.
  • Describe the physical, chemical, and engineering principles involved in design and operation of the microfabricated devices.
  • Describe the current challenges and limitation in microfabrication.
  • Describe new applications and directions in microfabrication.

Sample Syllabus can be downloaded here: